Harvard's Center for Nanoscale Systems (CNS) has recently completed acceptance testing of their second Elionix EBL system. With a guaranteed linewidth of 5nm and superior large field writing uniformity, the Elionix ELS-F125 goes well beyond today's 100kV EBL tools.
10 Angstroms has just signed an exclusive sales contract with Attolight that covers the Eastern U.S. and the province of Ontatrio, Canada. The new Cathodoluminescence system from Attolight is the only alternative to dynamically characterize materials of the future for LEDs, solar cells, or semiconductor devices.