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Elionix Product Gallery
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Elionix ELS-F125 (125 kV)
The Elionix ELS-F125 is the only Electron Beam Lithography system in the world to guarantee fabrication of 5 nanometer linewidths. In addition to being the only system to offer an accelerating voltage of 125 kV, the ELS-F125 has dramatically increased throughtput, reduced distortion in large write fields, and reduced footprint from previous generation models. |
Elionix ELS-7000 (100 kV)
The Elionix ELS-7000 is capable of generating patterns with a line width of less than 8 nm. The highly precise laser interferometer stage that the ELS-7000 employs is based on 30 years of expertise with lithography systems. |
Elionix ELS-7800 (80 kV)
The Elionix ELS-7800 Electron Beam Lithography (EBL) system is capable of writing an 8 nm line with an acceleration voltage of 80 kV. The ELS-7800 comes standard with the Elionix developed CAD system that accepts conventional CAD formats. |
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Elionix ELS-7500EX (50 kV)
The Elionix ELS-7500EX is a compact, windows-based, electron beam lithography system capable of a minimum line width of 10 nm. The ELS-7500EX offers a ZrO/W TFE gun with a maximum acceleration voltage of 50 kV. |