SVTA

The NorthStar^TM ALD System is a versatile research deposition tool for thermal or energy enhanced ALD. With up to 8 precursor lines and a hot wall deposition chamber, a wide range of applications may be performed.

The SMART (Scientific Materials and Applied Research Tool) Pulsed Laser Deposition System combines Laser Ablation with SVTA's unique deposition techniques that offers a broad range of materials and applications possibilities.

The SMART Physical Vapor Deposition System combines multiple deposition techniques in a single chamber that allows a researcher to continually develop complex materials.